MetroCal™

This etched polysilicon wafer is intended for automated CD Metrology tool Calibration. MetroCal is available in 200mm and 300mm wafer sizes. Benefits of consistent calibration include improved recipe portability, multiple system matching, and long-term single-tool measurement precision. >>Details...

MetroChip™

This calibration target is a 20mm by 20mm die from 200mm MetroCal wafers. It is shipped with documentation as shown. MetroChip is available from Ted Pella, Inc., the leading provider of microscopy supplies.
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Overlay Booster™

A Windows-based software package for control and optimization of overlay and registration in lithography tools. Overlay Booster is specially suited for sparse sampling plans used in manufacturing. This product can also be used for in-line or off-line viewing of production lot data. >>Details...

MetroView™

Enhance fab productivity with MetroBoost's powerful, easy-to-use software for Critical Dimension data viewing and monitoring. MetroView takes advantage of stored SEM images to shorten lot disposition time and reduce scrap. Focus/Exposure Analyzer is an add-on module. >>Details...